Imaging patterns of intensity in topographically directed photolithography

Kateri E. Paul, Tricia L. Breen, Tanja Hadzik, George M. Whitesides, Stephen P. Smith, Mara Prentiss
  • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2005, American Vacuum Society
  • DOI: 10.1116/1.1924415

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