Low-temperature growth of Ti(C,N) thin films on D2 steel and Si(100) substrates by plasma-enhanced metalorganic chemical vapor deposition

  • Jin-Hyo Boo, Cheol Ho Heo, Yong Ki Cho, Jeon-Geon Han
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, January 2000, American Vacuum Society
  • DOI: 10.1116/1.582390

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1116/1.582390

The following have contributed to this page: Professor Jeon Geon Han