Low-temperature growth of Ti(C,N) thin films on D2 steel and Si(100) substrates by plasma-enhanced metalorganic chemical vapor deposition

  • Jin-Hyo Boo, Cheol Ho Heo, Yong Ki Cho, Jeon-Geon Han
  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, January 2000, American Vacuum Society
  • DOI: 10.1116/1.582390

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The following have contributed to this page: Professor Jeon Geon Han