Correlation of band gap position with composition in high-k films

Li Ding, Marion Friedrich, Michael Fronk, Ovidiu D. Gordan, Dietrich R. T. Zahn, Lin Chen, David Wei Zhang, Christoph Cobet, Norbert Esser
  • Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, May 2014, American Vacuum Society
  • DOI: 10.1116/1.4866399
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The following have contributed to this page: Professor Dietrich RT Zahn