Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction

Mathias Rommel, Joachim D. Jambreck, Martin Lemberger, Anton J. Bauer, Lothar Frey, Katsuhisa Murakami, Christoph Richter, Philipp Weinzierl
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2013, American Vacuum Society
  • DOI: 10.1116/1.4768679
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The following have contributed to this page: Dr. Mathias Rommel