Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

M. Rommel, G. Spoldi, V. Yanev, S. Beuer, B. Amon, J. Jambreck, S. Petersen, A. J. Bauer, L. Frey
  • January 2010, American Vacuum Society
  • DOI: 10.1116/1.3431085
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The following have contributed to this page: Dr. Mathias Rommel