Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSi[sub x]O[sub 2−x] thin films using tunneling atomic force microscopy

W. Weinreich, L. Wilde, P. Kücher, M. Lemberger, V. Yanev, M. Rommel, A. J. Bauer, E. Erben, J. Heitmann, U. Schröder, L. Oberbeck
  • January 2009, American Vacuum Society
  • DOI: 10.1116/1.3058725
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The following have contributed to this page: Dr. Mathias Rommel