Impact of registration error of reticle on total overlay error budget

  • Doo-Youl Lee, Yong-Jin Chun, Je-Bum Yoon, Sang-Hee Lee, Suk-Joo Lee, Han-Ku Cho, Joo-Tae Moon
  • Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena, January 2006, American Vacuum Society
  • DOI: 10.1116/1.2395959

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http://dx.doi.org/10.1116/1.2395959