Alternating phase shifted scattering bars for low k[sub 1] trench pattering

Sohan Singh Mehta, Rakesh Kumar, Navab Singh, Hideki Suda, Takao Kubota, Yasuki Kimura, Hiroshi Kinoshita, T. K. S. Wong, Ji Wei
  • January 2006, American Vacuum Society
  • DOI: 10.1116/1.2203637
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The following have contributed to this page: Mr. Sohan S Mehta