Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotropic wet etching

  • Massimo Tormen, Alessandro Carpentiero, Lisa Vaccari, Matteo Altissimo, Enrico Ferrari, Dan Cojoc, Enzo Di Fabrizio
  • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2005, American Vacuum Society
  • DOI: 10.1116/1.2130348

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http://dx.doi.org/10.1116/1.2130348