Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques

  • Adam W. Harant, Stephen G. Whipple, Kenneth Douglas, Christopher N. Bowman
  • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2005, American Vacuum Society
  • DOI: 10.1116/1.1861041

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The following have contributed to this page: Professor Christopher N Bowman