Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques

  • Adam W. Harant, Stephen G. Whipple, Kenneth Douglas, Christopher N. Bowman
  • Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena, January 2005, American Vacuum Society
  • DOI: 10.1116/1.1861041

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1116/1.1861041

The following have contributed to this page: Professor Christopher N Bowman