Applications of the digital holography to the dynamic characterization of MEMS: a micromechanical shunt switch and a micro-gassensor

V. Striano, G. Coppola, P. Ferraro, D. Alfieri, S. De Nicola, G. Pierattini, A. Finizio, R. Marcelli, P. Maccagnani
  • Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/wfopc.2005.1462105

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http://dx.doi.org/10.1109/wfopc.2005.1462105

The following have contributed to this page: Dr Romolo Marcelli