Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization

R. Marcelli, G. Soncini, K.J. Rangra, F. Giacomozzi, B. Margesin, L. Lorenzelli, V. Mulloni, C. Collini
  • Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/smicnd.2004.1402830

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http://dx.doi.org/10.1109/smicnd.2004.1402830

The following have contributed to this page: Viviana Mulloni