What is it about?
We have developed and investigated several types of miniature cryogenic resistance thermometers based on germanium films on gallium arsenide and silicon thermodiode temperature sensors. A small-scale production of these devices is organized. The temperature measurement intervals of the resistance thermometers cover the 25 mK to 300 K temperature range, while those of thermodiodes cover the 4 to 600 K temperature range.
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Perspectives
Temperature microsensors based on resistors and diodes will be developed and used.
PhD Vadim F Mitin
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This page is a summary of: Temperature microsensors, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/smicnd.1999.810593.
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