Development of the Vacuum Spark as an EUV Source for Next Generation Lithography

Chew Soo Hoon, Wong Chiow San
  • November 2006, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/smelec.2006.381096

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http://dx.doi.org/10.1109/smelec.2006.381096

The following have contributed to this page: Dr Chiow-San Wong

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