Simulations of SF6 plasma etching in the GEC Reference Cell

Sergio Lopez-Lopez, James J. Munro, Daniel Brown, Jonathan Tennyson
  • September 2011, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/scd.2011.6068740

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http://dx.doi.org/10.1109/scd.2011.6068740

The following have contributed to this page: Jonathan Tennyson