Development of gas jet type Z-pinch EUV light source for lithography

I.h. Song, K. Iwata, Y. Homma, S.R. Mohanty, M. Watanabe, T. Kawamura, A. Okino, K. Yasuoka, K. Horioka, E. Hotta
  • June 2005, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/ppc.2005.300482

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http://dx.doi.org/10.1109/ppc.2005.300482

The following have contributed to this page: Professor Akitoshi Okino