Plasma acid and its applications

  • Haifeng Ji, Young Cho, Natalie Shainsky, Danil Dobrynin, Utku Ercan, Suresh Joshi, Ari Brooks, Gregory Fridman, Alexander Fridman, Gary Friedman
  • June 2011, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/plasma.2011.5992900

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