Development of 335 mm linear-type atmospheric plasma source for surface treatment

Masaki Ichikawa, Ryota Sasaki, Shotaro Yamasaki, Hideyuki Hirai, Toshiyuki Tamura, Hidekazu Miyahara, Akitoshi Okino
  • June 2010, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/plasma.2010.5534025

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http://dx.doi.org/10.1109/plasma.2010.5534025

The following have contributed to this page: Professor Akitoshi Okino