Behavior of laser assisted tin discharge EUV emitting plasma

Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Eiki Hotta
  • June 2009, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/plasma.2009.5227409

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http://dx.doi.org/10.1109/plasma.2009.5227409

The following have contributed to this page: Professor Akitoshi Okino