Experimental study of xenon and tin discharge produced plasma EUV light source

Masato Watanabe, Nozomu Kishi, Junzaburo Yamada, Osamu Sakuchi, Jiang Fei, Zhu Qiushi, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta
  • June 2008, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/plasma.2008.4590703

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http://dx.doi.org/10.1109/plasma.2008.4590703

The following have contributed to this page: Professor Akitoshi Okino