Direct Injection Multi-Gas Inductively Coupled Plasma Source for Industrial Applications

Akitoshi Okino, Hidekazu Miyahara, Takayuki Doi, Yoichi Mizusawa, Eiki Hotta
  • June 2005, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/plasma.2005.359095

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http://dx.doi.org/10.1109/plasma.2005.359095

The following have contributed to this page: Professor Akitoshi Okino