High-Speed Control of Electromechanical Transduction: Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors

  • IEEE Control Systems, October 2016, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/mcs.2016.2584338

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http://dx.doi.org/10.1109/mcs.2016.2584338

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