A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom

Lawrence K. Barrett, Thomas Stark, Jeremy Reeves, Richard Lally, Alexander Stange, Corey Pollock, Matthias Imboden, David J. Bishop
  • Journal of Microelectromechanical Systems, February 2019, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2018.2886653

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http://dx.doi.org/10.1109/jmems.2018.2886653

The following have contributed to this page: Dr Matthias Imboden