Engineered PWM Drives for Achieving Rapid Step and Settle Times for MEMS Actuation

Corey Pollock, Matthias Imboden, Alexander Stange, Josh Javor, Koshik Mahapatra, Leila Chiles, David J. Bishop
  • Journal of Microelectromechanical Systems, June 2018, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2018.2826843

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http://dx.doi.org/10.1109/jmems.2018.2826843

The following have contributed to this page: Dr Matthias Imboden