Comb Drive Designs With Minimized Levitation

Pablo G. del Corro, Matthias Imboden, David J. Bishop, Hernan Pastoriza
  • Journal of Microelectromechanical Systems, December 2016, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2016.2614965

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http://dx.doi.org/10.1109/jmems.2016.2614965

The following have contributed to this page: Dr Matthias Imboden