Controlling Levitation and Enhancing Displacement in Electrostatic Comb Drives of MEMS Actuators

Matthias Imboden, Jessica Morrison, Evan Lowell, Han Han, David J. Bishop
  • Journal of Microelectromechanical Systems, October 2014, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2014.2303898

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http://dx.doi.org/10.1109/jmems.2014.2303898

The following have contributed to this page: Dr Matthias Imboden