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Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone
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Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone
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Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone
Dr Jamel Nebhen
Ecole Centrale Lille/IEMN
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This page is a summary of: Low-noise smart sensor based on silicon nanowire for MEMS resistive microphone, November 2013, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/icsens.2013.6688605.
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