A dual mode SOI CMOS MEMS based thermal conductivity and IR absorption gas sensor

Sohab Sarfraz, R. Vasant Kumar, Florin Udrea
  • November 2013, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/icsens.2013.6688153

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http://dx.doi.org/10.1109/icsens.2013.6688153

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