Optimization of a gas jet-type Z-pinch discharge EUV light source

Naoya Iizuka, Nozomu Kishi, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, Smruti R.Mohanty, Masahito Watanabe, Akitoshi Okino, Eiki Hotta
  • January 2006, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/deiv.2006.357381

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http://dx.doi.org/10.1109/deiv.2006.357381

The following have contributed to this page: Professor Akitoshi Okino