Micro-mechanical characterisation for MEMS thin films by bending μ-machined cantilevers

J.H. He, D.F. Moore, H. Taylor, M. Boutchich, P. Boyle, G. McShane, M. Hopcroft, J.K. Luo
  • January 2004,
  • DOI: 10.1109/asdam.2004.1441217

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The following have contributed to this page: Jack Luo (Jikui Luo)