Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source

Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta
  • October 2011, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/aismot.2011.6159346

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http://dx.doi.org/10.1109/aismot.2011.6159346

The following have contributed to this page: Professor Akitoshi Okino