Complex mathematical models of comb drive accelerometers

S. Wiak, K. Smolka
  • September 2007, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/acemp.2007.4510533

Models of comb drive accelerometers

What is it about?

This paper deals with the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers.

Why is it important?

Keeping knowledge about predefined accelerometer structure we start computer simulation procedure leading to final structure design, then to be defined as a basic structure for object oriented models.

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http://dx.doi.org/10.1109/acemp.2007.4510533

The following have contributed to this page: Krzysztof Smółka