What is it about?
Different (nano-/micro-)mechanical characterization methods of atomic layer deposited micro- and nanostructures were presented in this paper. The basic system uses a fully-programmable micro-robotic assembly in combination with force sensors to study different structures mainly by pushing.
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Why is it important?
The programmability and the controllability of the micro-robotic assembly increases the repeatability and reliability of the measurements and enables precise characterization of micro- and nanosctructures.
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This page is a summary of: Characterization of nano-coated micro- and nanostructures by pushing, October 2014, Institute of Electrical & Electronics Engineers (IEEE),
DOI: 10.1109/3m-nano.2014.7057329.
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