Smoothing of Discharge Inhomogeneities at High Currents in Gasless High Power Impulse Magnetron Sputtering

Joakim Andersson, Pavel Ni, Andre Anders
  • IEEE Transactions on Plasma Science, October 2014, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/tps.2014.2334600

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http://dx.doi.org/10.1109/tps.2014.2334600

The following have contributed to this page: Professor Andre Anders