Origin of the Delayed Current Onset in High-Power Impulse Magnetron Sputtering

Georgy Yu. Yushkov, André Anders
  • IEEE Transactions on Plasma Science, November 2010, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/tps.2010.2063041

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http://dx.doi.org/10.1109/tps.2010.2063041

The following have contributed to this page: Professor Andre Anders