Two-dimensional sample temperature modeling in separation by plasma implantation of oxygen (SPIMOX) process

Xiubo Tian, Dixon Tat-Kun Kwok, P.K. Chu, A. Anders
  • IEEE Transactions on Plasma Science, February 2002, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/tps.2002.1003891
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The following have contributed to this page: Professor Andre Anders