Selective Solid-Phase Silicon Epitaxy of ${\hbox{p}}^{+}$ Aluminum-Doped Contacts for Nanoscale Devices

  • Yann Civale, Lis K. Nanver, Hugo Schellevis
  • IEEE Transactions on Nanotechnology, March 2007, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/tnano.2007.891826

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http://dx.doi.org/10.1109/tnano.2007.891826