Analyze and optimize the silicide thickness in 45nm CMOS technology using Taguchi method

Fauziyah Salehuddin, Ibrahim Ahmad, Fazrena Azlee Hamid, Azami Zaharim
  • June 2010, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/smelec.2010.5549488
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The following have contributed to this page: Dr Fazrena Azlee Hamid