Differential Adhesion Method For Microstructure Release: An Alternative To The Sacrificial Layer

  • E. Smela, O. Ingands, I. Lundstrom
  • Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/sensor.1995.717146

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http://dx.doi.org/10.1109/sensor.1995.717146

The following have contributed to this page: Professor Elisabeth Smela