The Preparation of Self-formed PDMS Nanostructures by RIE Etching

Ming-Hung Chen, Tsung-Hsing Hsu, Yun-Ju Chuang, Po-Hung Chen, Fan-Gang Tseng
  • January 2007, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/nems.2007.352181
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http://dx.doi.org/10.1109/nems.2007.352181