Dry transfer bonding of porous silicon membranes to OSTE(+) polymer microfluidic devices

Farizah Saharil, Kristinn B. Gylfason, Yitong Liu, Tommy Haraldsson, Paolo Bettotti, Neeraj Kumar, Wouter van der Wijngaart
  • January 2012, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/memsys.2012.6170133
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The following have contributed to this page: Dr Paolo Bettotti