A doubly anchored surface micromachined Pirani gauge for vacuum package characterization

B.H. Stark, Yuhai Mei, Chunbo Zhang, K. Najafi
  • Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/memsys.2003.1189797

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http://dx.doi.org/10.1109/memsys.2003.1189797