Tailoring Anchor Etching Profiles During MEMS Release Using Microfluidic Sheathed Flow

Ben C. Cheah, John M. Dell, Adrian J. Keating
  • Journal of Microelectromechanical Systems, August 2014, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2014.2300851

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http://dx.doi.org/10.1109/jmems.2014.2300851