MEMS Sensor for In Situ TEM Atomic Force Microscopy

A. Nafari, D. Karlen, C. Rusu, K. Svensson, H. Olin, P. Enoksson
  • Journal of Microelectromechanical Systems, April 2008, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/jmems.2007.912714
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The following have contributed to this page: Professor Håkan Olin