Chemical reaction thermodynamic model of Low Pressure CVD for Nano-TiO2 film preparation

  • Tao Li, Junfeng Yang, Hong-Chao Zhang, Chris Yuan
  • May 2012, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/issst.2012.6228023

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http://dx.doi.org/10.1109/issst.2012.6228023