Development of the micro displacement measurement system based on astigmatic method

  • Wei-Yao Hsu, Zong-Ru Yu, Po-Jui Chen, Ching-Hsiang Kuo, Chi-Hung Hwang
  • May 2011, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/imtc.2011.5944122

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http://dx.doi.org/10.1109/imtc.2011.5944122