MEMS Variable Capacitor Actuated with an Electrically Floating Plate

  • Young Jun Yoon, Hyung Suk Lee, Jun-Bo Yoon
  • January 2007, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/iedm.2007.4418965

The authors haven't yet claimed this publication.

Read Publication

http://dx.doi.org/10.1109/iedm.2007.4418965