Self-aligned mesa HBT with selective epitaxial regrown emitter and no base etch

Enquist, Slater, Hutchby, Morris, Trew
  • January 1992, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/iedm.1992.307314

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http://dx.doi.org/10.1109/iedm.1992.307314