Growth and characterization of Si/SiN/SiC structures by APCVD process

  • Yin-tang Yang, Hu-jun Jia, Chang-chun Chai, Yue-jin Li
  • October 2008, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/icsict.2008.4734635

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http://dx.doi.org/10.1109/icsict.2008.4734635