Raman based stress analysis of the active areas of a piezoresistive MEMS force sensor — Experimental setup, data processing, and comparison to numerically obtained results

P. Meszmer, K. Hiller, R. D. Rodriguez, E. Sheremet, D. R. T. Zahn, M. Hietschold, B. Wunderle
  • April 2016, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/eurosime.2016.7463340
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The following have contributed to this page: Professor Dietrich RT Zahn